Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360063 | System and method for measuring a sample by x-ray reflectance scatterometry | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2025-07-15 |
| 12165863 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2024-12-10 |
| 11874237 | System and method for measuring a sample by x-ray reflectance scatterometry | Heath A. Pois, David A. Reed, Bruno Shueler, Jeffrey T. Fanton | 2024-01-16 |
| 11764050 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2023-09-19 |
| 11430647 | Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2022-08-30 |
| 10910208 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2021-02-02 |
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2020-12-08 |
| 10636644 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2020-04-28 |
| 10481112 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2019-11-19 |
| 10403489 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2019-09-03 |
| 10119925 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2018-11-06 |
| 10056242 | Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry | David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Chris Bevis | 2018-08-21 |
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Jeffrey T. Fanton | 2017-03-07 |
| 9297771 | Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy | Jeffrey T. Fanton, Bruno W. Schueler, David A. Reed | 2016-03-29 |
| 9240254 | System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy | Bruno W. Schueler, David A. Reed, Jeffrey T. Fanton | 2016-01-19 |
| 8502979 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more | 2013-08-06 |
| 8179530 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more | 2012-05-15 |
| 7751046 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Mehrdad Nikoonahad, Dan Wack +2 more | 2010-07-06 |
| 7724357 | Backside contamination inspection device | — | 2010-05-25 |
| 7663746 | Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool | Paul Sullivan, Geroge Kren, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2010-02-16 |
| 7436506 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2008-10-14 |
| 7433037 | System for measuring periodic structures | Guoheng Zhao, Kenneth P. Gross, Mehrdad Nikoonahad | 2008-10-07 |
| 7209227 | Backside contamination inspection device | — | 2007-04-24 |
| 7193715 | Measurement of overlay using diffraction gratings when overlay exceeds the grating period | Abdurrahman Sezginer, Hsu-Ting Huang | 2007-03-20 |
| 7009696 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool | Paul Sullivan, George Kren, Hans J. Hansen, David W. Shortt, Daniel Kavaldjiev +1 more | 2006-03-07 |