Issued Patents All Time
Showing 1–25 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8502979 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Dan Wack +2 more | 2013-08-06 |
| 8179530 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Dan Wack +2 more | 2012-05-15 |
| 7826071 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant, Ady Levy, Daniel Wack, Noah Bareket +2 more | 2010-11-02 |
| 7821654 | System for scatterometric measurements and applications | Anatoly Fabrikant, Guoheng Zhao, Daniel Wack | 2010-10-26 |
| 7751046 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Rodney Smedt, Gary Bultman, Dan Wack +2 more | 2010-07-06 |
| 7656529 | Overlay error measurement using fourier optics | — | 2010-02-02 |
| 7511830 | System for scatterometric measurements and applications | Anatloy Fabrikant, Guoheng Zhao, Daniel Wack | 2009-03-31 |
| 7477372 | Optical scanning system for surface inspection | Brian C. Leslie, Keith Wells | 2009-01-13 |
| 7460981 | Methods and systems for determining a presence of macro and micro defects on a specimen | Gary Bultman, Ady Levy, Kyle Brown, Dan Wack, John Fielden | 2008-12-02 |
| 7433037 | System for measuring periodic structures | Guoheng Zhao, Kenneth P. Gross, Rodney Smedt | 2008-10-07 |
| 7375810 | Overlay error detection | Guoheng Zhao, Andrei V. Shchegrov, Ben-ming Benjamin Tsai | 2008-05-20 |
| 7369233 | Optical system for measuring samples using short wavelength radiation | Shing Lee, Hidong Kwak, Sergio Edelstein, Guoheng Zhao, Gary Janik | 2008-05-06 |
| 7349090 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, John Fielden | 2008-03-25 |
| 7312881 | Parametric profiling using optical spectroscopic systems to adjust processing parameter | Andrei V. Shchegrov, Anatoly Fabrikant | 2007-12-25 |
| 7301649 | System for scatterometric measurements and applications | Anatoly Fabrikant, Guoheng Zhao, Daniel Wack | 2007-11-27 |
| 7295325 | Time-resolved measurement technique using radiation pulses | Hidong Kwak, Gary Janik | 2007-11-13 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant, Ady Levy, Daniel Wack, Noah Bareket +2 more | 2007-10-09 |
| 7196782 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2007-03-27 |
| 7139083 | Methods and systems for determining a composition and a thickness of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2006-11-21 |
| 7130029 | Methods and systems for determining an adhesion characteristic and a thickness of a specimen | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, John Fielden | 2006-10-31 |
| 7106425 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Gary Bultman, Ady Levy, Kyle Brown, Dan Wack, John Fielden | 2006-09-12 |
| 7099005 | System for scatterometric measurements and applications | Anatoly Fabrikant, Guoheng Zhao, Daniel Wack | 2006-08-29 |
| 7084967 | Scanning system for inspecting anomalies on surfaces | Stanley Stokowski | 2006-08-01 |
| 7075637 | Optical scanning system for surface inspection | Brian C. Leslie, Keith Wells | 2006-07-11 |
| 7023549 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant | 2006-04-04 |