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Ashok Kulkarni |
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Multiple directional scans of test structures on semiconductor integrated circuits |
Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker |
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Optical scanning system for surface inspection |
Mehrdad Nikoonahad, Keith Wells |
2009-01-13 |
| 7075637 |
Optical scanning system for surface inspection |
Mehrdad Nikoonahad, Keith Wells |
2006-07-11 |
| 7012439 |
Multiple directional scans of test structures on semiconductor integrated circuits |
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2006-03-14 |
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Optical scanning system for surface inspection |
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2005-05-03 |
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Multiple directional scans of test structures on semiconductor integrated circuits |
Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker |
2005-03-15 |
| 6566885 |
Multiple directional scans of test structures on semiconductor integrated circuits |
Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker |
2003-05-20 |
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Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures |
Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Bin-Ming Benjamin Tsai |
2002-09-03 |
| 6433561 |
Methods and apparatus for optimizing semiconductor inspection tools |
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2002-08-13 |
| 6081325 |
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2000-06-27 |
| 5355212 |
Process for inspecting patterned wafers |
Keith Wells, Hung Nguyen, Ralph Johnson |
1994-10-11 |
| 5276498 |
Adaptive spatial filter for surface inspection |
Lee K. Galbraith, John L. Vaught, Ralph C. Wolf, Armand P. Neukermans |
1994-01-04 |
| 5083035 |
Position location in surface scanning using interval timing between scan marks on test wafers |
Jiri Pecen, Kenneth P. Gross, George Kren |
1992-01-21 |