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| 11263737 |
Defect classification and source analysis for semiconductor equipment |
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Generating high resolution images from low resolution images for semiconductor applications |
Jing Zhang, Grace Hsiu-Ling Chen, Kris Bhaskar, Nan BAI, Ping Gu +1 more |
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| 10012599 |
Optical die to database inspection |
Xiaochun Li, Lisheng Gao, Tao Luo, Markus Huber |
2018-07-03 |
| 9915625 |
Optical die to database inspection |
Lisheng Gao, Tao Luo, Xiaochun Li |
2018-03-13 |
| 9816940 |
Wafer inspection with focus volumetric method |
Grace Hsiu-Ling Chen, Markus Huber, Se Baek Oh |
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Optical scanning system for surface inspection |
Brian C. Leslie, Mehrdad Nikoonahad |
2009-01-13 |
| 7075637 |
Optical scanning system for surface inspection |
Brian C. Leslie, Mehrdad Nikoonahad |
2006-07-11 |
| 6922236 |
Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection |
Mehdi Vaez-Iravani, Stan Stokowski, Steven Biellak, Jamie M. Sullivan, Mehrdad Nikoonahad |
2005-07-26 |
| 6888627 |
Optical scanning system for surface inspection |
Brian C. Leslie, Mehrdad Nikoonahad |
2005-05-03 |
| 6081325 |
Optical scanning system for surface inspection |
Brian C. Leslie, Mehrdad Nikoonahad |
2000-06-27 |
| 5864394 |
Surface inspection system |
John R. Jordan, Mehrdad Nikoonahad |
1999-01-26 |
| 5604585 |
Particle detection system employing a subsystem for collecting scattered light from the particles |
Ralph Johnson, Lee K. Galbraith |
1997-02-18 |
| 5530550 |
Optical wafer positioning system |
Mehrdad Nikoonahad, Philip R. Rigg, David S. Calhoun |
1996-06-25 |
| 5355212 |
Process for inspecting patterned wafers |
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1994-10-11 |
