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Enhanced focusing capability on a sample using a spot matrix |
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System and method for reducing speckle noise in die-to-die inspection systems |
— |
2010-06-15 |
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Methods for detecting and classifying defects on a reticle |
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Methods and systems for reticle inspection and defect review using aerial imaging |
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2008-05-27 |
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Systems for simulating high NA and polarization effects in aerial images |
Don Pettibone |
2006-11-07 |
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Methods and systems for inspecting reticles using aerial imaging and die-to-database detection |
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Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths |
David Alles |
2006-04-11 |
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Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection |
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Apparatus and methods for removing optical abberations during an optical inspection |
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2005-01-18 |
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Method and system for detecting phase defects in lithographic masks and semiconductor wafers |
Damon F. Kvamme, Chun-Shen Lee, Donald Pettibone |
2004-04-27 |
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2003-11-11 |