Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8194240 | Enhanced focusing capability on a sample using a spot matrix | Mehdi Vaez-Iravani, Guoheng Zhao | 2012-06-05 |
| 7738092 | System and method for reducing speckle noise in die-to-die inspection systems | — | 2010-06-15 |
| 7738093 | Methods for detecting and classifying defects on a reticle | David Alles, Mark J. Wihl, Yalin Xiong, Damon F. Kvamme | 2010-06-15 |
| 7379175 | Methods and systems for reticle inspection and defect review using aerial imaging | David Alles | 2008-05-27 |
| 7133119 | Systems for simulating high NA and polarization effects in aerial images | Don Pettibone | 2006-11-07 |
| 7123356 | Methods and systems for inspecting reticles using aerial imaging and die-to-database detection | David Alles | 2006-10-17 |
| 7027143 | Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths | David Alles | 2006-04-11 |
| 6922236 | Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection | Mehdi Vaez-Iravani, Steven Biellak, Jamie M. Sullivan, Keith Wells, Mehrdad Nikoonahad | 2005-07-26 |
| 6844927 | Apparatus and methods for removing optical abberations during an optical inspection | Zain Saidin | 2005-01-18 |
| 6727512 | Method and system for detecting phase defects in lithographic masks and semiconductor wafers | Damon F. Kvamme, Chun-Shen Lee, Donald Pettibone | 2004-04-27 |
| 6646281 | Differential detector coupled with defocus for improved phase defect sensitivity | Matthias C. Krantz, Donald Pettibone, Damon F. Kvamme | 2003-11-11 |