Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415725 | System, method and apparatus for polarization control | Ivan Maleev | 2022-08-16 |
| 11302590 | Delivery of light into a vacuum chamber using an optical fiber | Emanuel Saerchen, Oscar G. Florendo, Li-Min Chen, Martin Brutsch | 2022-04-12 |
| 11170971 | Multiple working distance height sensor using multiple wavelengths | — | 2021-11-09 |
| 10921488 | System, method and apparatus for polarization control | Ivan Maleev | 2021-02-16 |
| 10739276 | Minimizing filed size to reduce unwanted stray light | Daniel Kavaldjiev, Chuanyong Huang, Qing Li, Frank Li, Zhiwei Xu | 2020-08-11 |
| 10462391 | Dark-field inspection using a low-noise sensor | Yung-Ho Alex Chuang, David L. Brown, Devis Contarato, John Fielden, Daniel Kavaldjiev +4 more | 2019-10-29 |
| 10324045 | Surface defect inspection with large particle monitoring and laser power control | Steve (Yifeng) Cui, Chunsheng Huang, Chunhai Wang, Christian Wolters, Bret Whiteside +2 more | 2019-06-18 |
| 9995850 | System, method and apparatus for polarization control | Ivan Maleev | 2018-06-12 |
| 9970873 | System and method for luminescent tag based wafer inspection | Chuanyong Huang, Kurt L. Haller | 2018-05-15 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9747670 | Method and system for improving wafer surface inspection sensitivity | — | 2017-08-29 |
| 9726615 | System and method for simultaneous dark field and phase contrast inspection | Chuanyong Huang, Qing Li, Buzz Graves | 2017-08-08 |
| 6727512 | Method and system for detecting phase defects in lithographic masks and semiconductor wafers | Stan Stokowski, Damon F. Kvamme, Chun-Shen Lee | 2004-04-27 |
| 6646281 | Differential detector coupled with defocus for improved phase defect sensitivity | Matthias C. Krantz, Damon F. Kvamme, Stan Stokowski | 2003-11-11 |
| 6013900 | High efficiency lightwave oven | Eugene R. Westerberg | 2000-01-11 |
| 5990454 | Lightwave oven and method of cooking therewith having multiple cook modes and sequential lamp operation | Eugene R. Westerberg, Gay Winterringer | 1999-11-23 |
| 5958271 | Lightwave oven and method of cooking therewith with cookware reflectivity compensation | Eugene R. Westerberg | 1999-09-28 |
| 5883362 | Apparatus and method for regulating cooking time in a lightwave oven | John W. O'Neal, Gay Winterringer | 1999-03-16 |
| 4882540 | Magnetic resonance imaging (MRI)apparatus with quadrature radio frequency (RF) coils | Robert Domenick, Phillip Foreman, David M. Parish | 1989-11-21 |
| 4523293 | Two-dimensional bulk acoustic wave correlator-convolver | Bert A. Auld, James D. Plummer | 1985-06-11 |