Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703460 | Methods and systems for optical surface defect material characterization | Zhiwei Xu, J. K. Leong, Christian Wolters | 2023-07-18 |
| 10551320 | Activation of wafer particle defects for spectroscopic composition analysis | — | 2020-02-04 |
| 9970873 | System and method for luminescent tag based wafer inspection | Donald Pettibone, Chuanyong Huang | 2018-05-15 |
| 9194812 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2015-11-24 |
| 9052190 | Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections | Ali Salehpour, Jaydeep Sinha, Pradeep Vukkadala, George Kren, Jiayao Zhang +1 more | 2015-06-09 |
| 8830464 | Film thickness, refractive index, and extinction coefficient determination for film curve creation and defect sizing in real time | David Feiler | 2014-09-09 |
| 8786850 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2014-07-22 |
| 7968354 | Methods for correlating backside and frontside defects detected on a specimen and classification of backside defects | Susan S. Lopez | 2011-06-28 |
| 7728965 | Systems and methods for inspecting an edge of a specimen | Steve Cui, Jared Lera | 2010-06-01 |
| 7697129 | Systems and methods for inspecting a wafer with increased sensitivity | David W. Shortt, Christian Wolters | 2010-04-13 |
| 7436505 | Computer-implemented methods and systems for determining a configuration for a light scattering inspection system | Alexander Belyaev, Daniel Kavaldjiev, Amith Murali, Aleksey Petrenko, Mike Kirk +2 more | 2008-10-14 |
| 7372559 | Systems and methods for inspecting a wafer with increased sensitivity | David W. Shortt, Christian Wolters | 2008-05-13 |
| 6191338 | Adhesive bandage, matrix, and methods of removal | — | 2001-02-20 |
| 5387777 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, John S. McKillop, Gary S. Selwyn +1 more | 1995-02-07 |
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, John S. McKillop, Gary S. Selwyn +1 more | 1994-11-22 |
| 5298720 | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode | Jerome J. Cuomo, Michael V. Grazioso, Charles R. Guarnieri, John E. Heidenreich, III, Gary S. Selwyn +1 more | 1994-03-29 |
| 5255089 | Portable particle detector assembly | David E. Dybas, Edward F. Patterson, Gary S. Selwyn | 1993-10-19 |