Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6057220 | Titanium polycide stabilization with a porous barrier | Atul Ajmera, Christine Dehm, Anthony G. Domenicucci, Stephen K. Loh, Christopher C. Parks +1 more | 2000-05-02 |
| 5882992 | Method for fabricating Tungsten local interconnections in high density CMOS circuits | Edward Kobeda, Jeffrey P. Gambino, Nickolas Joseph Mazzeo | 1999-03-16 |
| 5546322 | Method and system for analyzing plasma data | Brock Estel Osborn | 1996-08-13 |
| 5387777 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, Kurt L. Haller, John S. McKillop, Gary S. Selwyn +1 more | 1995-02-07 |
| 5378312 | Process for fabricating a semiconductor structure having sidewalls | Yeong-Jyh T. Lii, Jin J. Wu | 1995-01-03 |
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, Kurt L. Haller, John S. McKillop, Gary S. Selwyn +1 more | 1994-11-22 |
| 5347460 | Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication | Brock Estel Osborn | 1994-09-13 |
| 5338702 | Method for fabricating tungsten local interconnections in high density CMOS | Edward Kobeda, Jeffrey P. Gambino, Nickolas Joseph Mazzeo | 1994-08-16 |
| 5200023 | Infrared thermographic method and apparatus for etch process monitoring and control | James A. O'Neill | 1993-04-06 |