Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9194812 | Illumination energy management in surface inspection | Christian Wolters, Kurt L. Haller, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2015-11-24 |
| 9068952 | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system | Christian Wolters, Zhongping Cai, Anatoly Romanovsky, Bret Whiteside | 2015-06-30 |
| 8934091 | Monitoring incident beam position in a wafer inspection system | Juergen Reich, Richard Fong, Bret Whiteside, Jien Cao, Christian Wolters +2 more | 2015-01-13 |
| 8786850 | Illumination energy management in surface inspection | Christian Wolters, Kurt L. Haller, Juergen Reich, Zhiwei Xu, Stephen Biellak +1 more | 2014-07-22 |
| 8042254 | Method for improving edge handling chuck aerodynamics | Alexander Belyaev, Christian Wolters, Paul Doyle | 2011-10-25 |
| 7605915 | System and method to create haze standard | Christian Wolters, Jurgen Reich | 2009-10-20 |
| 7436505 | Computer-implemented methods and systems for determining a configuration for a light scattering inspection system | Alexander Belyaev, Daniel Kavaldjiev, Amith Murali, Mike Kirk, David W. Shortt +2 more | 2008-10-14 |