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Monitoring changes in photomask defectivity |
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2018-02-13 |
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Monitoring changes in photomask defectivity |
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2016-12-13 |
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Method for detecting lithographically significant defects on reticles |
Yalin Xiong, Lih-Huah Yiin |
2011-01-18 |
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Methods for detecting and classifying defects on a reticle |
David Alles, Stan Stokowski, Yalin Xiong, Damon F. Kvamme |
2010-06-15 |
| 7027635 |
Multiple design database layer inspection |
George Chen, Jun Ye, Lih-Huah Yiin, Pei-Chun Chiang |
2006-04-11 |
| 6674522 |
Efficient phase defect detection system and method |
Matthias C. Krantz, Stanley Stokowski |
2004-01-06 |
| 6584218 |
Automated photomask inspection apparatus |
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2003-06-24 |
| 6363166 |
Automated photomask inspection apparatus |
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2002-03-26 |
| 6052478 |
Automated photomask inspection apparatus |
Tao-Yi Fu, Marek Zywno, Damon F. Kvamme, Michael E. Fein |
2000-04-18 |
| 5737072 |
Automated photomask inspection apparatus and method |
David G. Emery, Zain Saidin, Tao-Yi Fu, Marek Zywno, Damon F. Kvamme +1 more |
1998-04-07 |
| 5572598 |
Automated photomask inspection apparatus |
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1996-11-05 |
| 5563702 |
Automated photomask inspection apparatus and method |
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| 5085517 |
Automatic high speed optical inspection system |
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1990-05-15 |
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Automatic photomask inspection system having image enhancement means |
— |
1986-12-30 |
| 4579455 |
Photomask inspection apparatus and method with improved defect detection |
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1986-04-01 |
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Automatic system and method for inspecting hole quality |
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1985-11-26 |
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Photomask inspection apparatus and method using corner comparator defect detection algorithm |
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1985-07-30 |