Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8629902 | Coordinate fusion and thickness calibration for semiconductor wafer edge inspection | Isabella Talley Lewis | 2014-01-14 |
| 7126699 | Systems and methods for multi-dimensional metrology and/or inspection of a specimen | Stephen Hiebert, Frank Kole, Richard Schmidley | 2006-10-24 |
| 6917421 | Systems and methods for multi-dimensional inspection and/or metrology of a specimen | Stephen Hiebert, Richard Schmidley | 2005-07-12 |
| 4805123 | Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems | Donald F. Specht, Scott A. Young, James J. Hager, Jr., Matthew B. Lutzker | 1989-02-14 |
| 4758094 | Process and apparatus for in-situ qualification of master patterns used in patterning systems | Frank D. Yasher | 1988-07-19 |
| 4532650 | Photomask inspection apparatus and method using corner comparator defect detection algorithm | Mark J. Wihl | 1985-07-30 |