TW

Tim S. Wihl

KI Kla Instruments: 3 patents #10 of 99Top 15%
KL Kla-Tencor: 3 patents #809 of 1,394Top 60%
Overall (All Time): #855,083 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8629902 Coordinate fusion and thickness calibration for semiconductor wafer edge inspection Isabella Talley Lewis 2014-01-14
7126699 Systems and methods for multi-dimensional metrology and/or inspection of a specimen Stephen Hiebert, Frank Kole, Richard Schmidley 2006-10-24
6917421 Systems and methods for multi-dimensional inspection and/or metrology of a specimen Stephen Hiebert, Richard Schmidley 2005-07-12
4805123 Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems Donald F. Specht, Scott A. Young, James J. Hager, Jr., Matthew B. Lutzker 1989-02-14
4758094 Process and apparatus for in-situ qualification of master patterns used in patterning systems Frank D. Yasher 1988-07-19
4532650 Photomask inspection apparatus and method using corner comparator defect detection algorithm Mark J. Wihl 1985-07-30