FY

Frank D. Yasher

KI Kla Instruments: 1 patents #46 of 99Top 50%
Overall (All Time): #3,955,620 of 4,157,543Top 100%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
4758094 Process and apparatus for in-situ qualification of master patterns used in patterning systems Tim S. Wihl 1988-07-19