ML

Matthew B. Lutzker

KI Kla Instruments: 1 patents #46 of 99Top 50%
TI Tencor Instruments: 1 patents #25 of 50Top 50%
Overall (All Time): #2,304,136 of 4,157,543Top 60%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5241366 Thin film thickness monitor Christopher F. Bevis, Armand P. Neukermans, Stanley Stokowski, Ralph C. Wolf 1993-08-31
4805123 Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems Donald F. Specht, Tim S. Wihl, Scott A. Young, James J. Hager, Jr. 1989-02-14