Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733640 | Method and apparatus for database-assisted requalification reticle inspection | Venkatraman Iyer, Rui-fang Shi | 2017-08-15 |
| 9092847 | Detection of thin lines for selective sensitivity during reticle inspection using processed images | Zhengyu Wang, Rui-fang Shi, Bing Li | 2015-07-28 |
| 8855400 | Detection of thin lines for selective sensitivity during reticle inspection using processed images | Zhengyu Wang, Rui-fang Shi, Bing Li | 2014-10-07 |
| 8090189 | Detection of thin line for selective sensitivity during reticle inspection | Vinayak Dattatreya Phalke, Ge Cong, Yalin Xiong | 2012-01-03 |
| 7873204 | Method for detecting lithographically significant defects on reticles | Mark J. Wihl, Yalin Xiong | 2011-01-18 |
| 7499156 | Closed region defect detection system | George Chen, Yu Cao | 2009-03-03 |
| 7167185 | Visualization of photomask databases | Yen-Wen Lu, George Chen | 2007-01-23 |
| 7126681 | Closed region defect detection system | George Chen, Yu Cao | 2006-10-24 |
| 7027635 | Multiple design database layer inspection | Mark J. Wihl, George Chen, Jun Ye, Pei-Chun Chiang | 2006-04-11 |