| 9619878 |
Inspecting high-resolution photolithography masks |
Fred E. Stanke, Ilya Toytman, Gregg Anthony Inderhees, Stanley Stokowski, Stanley E. Mehdi Vaez-Iravani |
2017-04-11 |
| 9348214 |
Spectral purity filter and light monitor for an EUV reticle inspection system |
Daimian Wang, Li-Ping Wang, Frank Chilese |
2016-05-24 |
| 8928895 |
Auto focus system for reticle inspection |
Michael J. Wright, Robert W. Walsh, Daniel L. Belin |
2015-01-06 |
| 8772731 |
Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool |
Pradeep Subrahmanyan, Daniel Wack, Michael J. Wright |
2014-07-08 |
| 7926959 |
Beam conditioning to reduce spatial coherence |
Damon F. Kvamme, Chun-Sheu Lee, Wu Jiang |
2011-04-19 |
| 7835015 |
Auto focus system for reticle inspection |
Michael J. Wright, Robert W. Walsh, Daniel L. Belin |
2010-11-16 |
| 7738093 |
Methods for detecting and classifying defects on a reticle |
Mark J. Wihl, Stan Stokowski, Yalin Xiong, Damon F. Kvamme |
2010-06-15 |
| 7379175 |
Methods and systems for reticle inspection and defect review using aerial imaging |
Stan Stokowski |
2008-05-27 |
| 7123356 |
Methods and systems for inspecting reticles using aerial imaging and die-to-database detection |
Stan Stokowski |
2006-10-17 |
| 7046352 |
Surface inspection system and method using summed light analysis of an inspection surface |
Aditya Dayal, George Chen |
2006-05-16 |
| 7027143 |
Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths |
Stan Stokowski |
2006-04-11 |
| 6748103 |
Mechanisms for making and inspecting reticles |
Lance Glasser, Jun Ye, Shauh-Teh Juang, James Wiley |
2004-06-08 |
| 6654489 |
Apparatus and methods for collecting global data during a reticle inspection |
James Wiley, Jun Ye, Shauh-Teh Juang, Yen-Wen Lu, Yu Cao |
2003-11-25 |
| 6529621 |
Mechanisms for making and inspecting reticles |
Lance Glasser, Jun Ye, Shauh-Teh Juang, James Wiley |
2003-03-04 |
| 6516085 |
Apparatus and methods for collecting global data during a reticle inspection |
James Wiley, Jun Ye, Shauh-Teh Juang, Yen-Wen Lu, Yu Cao |
2003-02-04 |