Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9619878 | Inspecting high-resolution photolithography masks | Fred E. Stanke, Ilya Toytman, Gregg Anthony Inderhees, Stanley Stokowski, Stanley E. Mehdi Vaez-Iravani | 2017-04-11 |
| 9348214 | Spectral purity filter and light monitor for an EUV reticle inspection system | Daimian Wang, Li-Ping Wang, Frank Chilese | 2016-05-24 |
| 8928895 | Auto focus system for reticle inspection | Michael J. Wright, Robert W. Walsh, Daniel L. Belin | 2015-01-06 |
| 8772731 | Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool | Pradeep Subrahmanyan, Daniel Wack, Michael J. Wright | 2014-07-08 |
| 7926959 | Beam conditioning to reduce spatial coherence | Damon F. Kvamme, Chun-Sheu Lee, Wu Jiang | 2011-04-19 |
| 7835015 | Auto focus system for reticle inspection | Michael J. Wright, Robert W. Walsh, Daniel L. Belin | 2010-11-16 |
| 7738093 | Methods for detecting and classifying defects on a reticle | Mark J. Wihl, Stan Stokowski, Yalin Xiong, Damon F. Kvamme | 2010-06-15 |
| 7379175 | Methods and systems for reticle inspection and defect review using aerial imaging | Stan Stokowski | 2008-05-27 |
| 7123356 | Methods and systems for inspecting reticles using aerial imaging and die-to-database detection | Stan Stokowski | 2006-10-17 |
| 7046352 | Surface inspection system and method using summed light analysis of an inspection surface | Aditya Dayal, George Chen | 2006-05-16 |
| 7027143 | Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths | Stan Stokowski | 2006-04-11 |
| 6748103 | Mechanisms for making and inspecting reticles | Lance Glasser, Jun Ye, Shauh-Teh Juang, James Wiley | 2004-06-08 |
| 6654489 | Apparatus and methods for collecting global data during a reticle inspection | James Wiley, Jun Ye, Shauh-Teh Juang, Yen-Wen Lu, Yu Cao | 2003-11-25 |
| 6529621 | Mechanisms for making and inspecting reticles | Lance Glasser, Jun Ye, Shauh-Teh Juang, James Wiley | 2003-03-04 |
| 6516085 | Apparatus and methods for collecting global data during a reticle inspection | James Wiley, Jun Ye, Shauh-Teh Juang, Yen-Wen Lu, Yu Cao | 2003-02-04 |