Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354973 | Stress and overlay management for semiconductor processing | Sean S. Kang, Sony Varghese | 2025-07-08 |
| 12217974 | Localized stress modulation by implant to back of wafer | Sony Varghese, Dennis Rodier, Kyuha Shim | 2025-02-04 |
| 12170230 | Methods of forming bottom dielectric isolation layers | Sankuei Lin | 2024-12-17 |
| 11997849 | V-NAND stacks with dipole regions | Yong Yang, Jacqueline S. Wrench, Yixiong Yang, Srinivas Gandikota | 2024-05-28 |
| 11092433 | Construction of three-dimensional profiles of high aspect ratio structures using top down imaging | — | 2021-08-17 |
| 10670393 | Construction of three-dimensional profiles of high aspect ratio structures using top down imaging | — | 2020-06-02 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, William Pierson, Ady Levy, Liran Yerushalmi +4 more | 2019-09-10 |
| 10381256 | Apparatus and method for chucking warped wafers | Luping Huang, Chris Pohlhammer | 2019-08-13 |
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Dzmitry Sanko +1 more | 2019-02-26 |
| 10209627 | Systems and methods for focus-sensitive metrology targets | Myungjun Lee, Stewart Robertson, Mark D. Smith | 2019-02-19 |
| 8779635 | Arrangement of reticle positioning device for actinic inspection of EUV reticles | Mark Williams, Samir Nayfeh | 2014-07-15 |
| 8772731 | Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool | Daniel Wack, Michael J. Wright, David Alles | 2014-07-08 |
| 7372660 | Disc storage system with adaptive PID control | — | 2008-05-13 |
| 7031116 | Moving magnet voice coil motor using Halbach arrays | — | 2006-04-18 |
| 6999909 | Process for designing an optimal vibration isolation mount for a disc drive | — | 2006-02-14 |
| 6898042 | Slider level microactuator with integrated fly control | — | 2005-05-24 |