| 12347567 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2025-07-01 |
|
| 11972873 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2024-04-30 |
$52,998,000 |
| 11530913 |
Methods and systems for determining quality of semiconductor measurements |
Min-Yeong Moon, Stilian Ivanov Pandev |
2022-12-20 |
$132,508,000 |
| 11520321 |
Measurement recipe optimization based on probabilistic domain knowledge and physical realization |
Stilian Ivanov Pandev, Wei Lu |
2022-12-06 |
$147,481,000 |
| 11417432 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2022-08-16 |
$70,131,000 |
| 11232867 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2022-01-25 |
$142,536,000 |
| 11024431 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2021-06-01 |
$176,837,000 |
| 10896761 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2021-01-19 |
$271,869,000 |
| 10758321 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2020-09-01 |
$66,178,000 |
| 10490462 |
Metrology systems and methods for process control |
Stilian Ivanov Pandev, Andrei V. Shchegrov |
2019-11-26 |
$159,570,000 |
| 10345095 |
Model based measurement systems with improved electromagnetic solver performance |
Stilian Ivanov Pandev, Leonid Poslavsky, Andrei V. Shchegrov |
2019-07-09 |
$125,821,000 |
| 10295342 |
System, method and computer program product for calibration of metrology tools |
Stilian Ivanov Pandev |
2019-05-21 |
|
| 10215559 |
Metrology of multiple patterning processes |
Stilian Ivanov Pandev, Alexander Kuznetsov |
2019-02-26 |
|
| 10216096 |
Process-sensitive metrology systems and methods |
Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Pradeep Subrahmanyan +1 more |
2019-02-26 |
|
| 10210606 |
Signal response metrology for image based and scatterometry overlay measurements |
Stilian Ivanov Pandev, Wei Lu, Siddharth Srivastava |
2019-02-19 |
|
| 9566132 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2017-02-14 |
$38,238,000 |
| 8545221 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2013-10-01 |
$29,949,000 |
| 8092215 |
Smile designer |
Michelle Stone-Collonge, Eric Kuo, Rick M. Matty, Fabio Pettinati, Thomas Maurer |
2012-01-10 |
$10,761,000 |
