Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Model based measurement systems with improved electromagnetic solver performance

Model based measurement systems with improved electromagnetic solver performance

US Patent 10345095 · Granted Jul 9, 2019

Estimated economic value: $125,821,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor measurements with robust in-line tool matching2025
Dynamic control of machine learning based measurement recipe optimization2025
Imaging reflectometry for inline screening2025
Massive overlay metrology sampling with multiple measurement columns2025
Smile designer2025
Methods and systems for measurement of tilt and overlay of a structure2025
Estimating in-die overlay with tool induced shift correction2024
Correcting target locations for temperature in semiconductor applications2024
Device feature specific edge placement error (EPE)2024
Methods and systems for targeted monitoring of semiconductor measurement quality2024
Methods and systems for combining x-ray metrology data sets to improve parameter2024
Smile designer2024