Issued Patents All Time
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422376 | Imaging reflectometry for inline screening | John Robinson, Shifang Li, Mike Von Den Hoff, Justin Lach, Barry Saville +5 more | 2025-09-23 |
| 12209854 | Methods and systems for measurement of tilt and overlay of a structure | Min-Yeong Moon | 2025-01-28 |
| 12181271 | Estimating in-die overlay with tool induced shift correction | Min-Yeong Moon, Dimitry Sanko | 2024-12-31 |
| 12148639 | Correcting target locations for temperature in semiconductor applications | Min-Yeong Moon, Phalguna Kumar Rachinayani, Jean-Christophe Perrin | 2024-11-19 |
| 11880142 | Self-calibrating overlay metrology | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2024-01-23 |
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11784097 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2023-10-10 |
| 11610297 | Tomography based semiconductor measurements using simplified models | — | 2023-03-21 |
| 11604420 | Self-calibrating overlay metrology | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11530913 | Methods and systems for determining quality of semiconductor measurements | Dzmitry Sanko, Min-Yeong Moon | 2022-12-20 |
| 11520321 | Measurement recipe optimization based on probabilistic domain knowledge and physical realization | Wei Lu, Dzmitry Sanko | 2022-12-06 |
| 11415898 | Signal-domain adaptation for metrology | — | 2022-08-16 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11313809 | Process control metrology | Wei Lu | 2022-04-26 |
| 11200658 | Model-based metrology using images | — | 2021-12-14 |
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2021-03-09 |
| 10935893 | Differential methods and apparatus for metrology of semiconductor targets | Andrei V. Shchegrov | 2021-03-02 |
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Alexander Buettner, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim | 2020-10-13 |
| 10769320 | Integrated use of model-based metrology and a process model | Alexander Kuznetsov, Andrei V. Shchegrov | 2020-09-08 |
| 10732516 | Process robust overlay metrology based on optical scatterometry | Andrei V. Shchegrov, Wei Lu | 2020-08-04 |
| 10612916 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2020-04-07 |
| 10580673 | Semiconductor metrology and defect classification using electron microscopy | Alexander Kuznetsov | 2020-03-03 |
| 10502549 | Model-based single parameter measurement | — | 2019-12-10 |
| 10502694 | Methods and apparatus for patterned wafer characterization | Thaddeus Gerard Dziura, Alexander Kuznetsov, Andrei V. Shchegrov | 2019-12-10 |