Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875946 | On-device metrology | Andrei V. Shchegrov, Jonathan M. Madsen, Ady Levy, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2017-11-14 |
| 9784690 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Noam Sapiens, Andrei V. Shchegrov | 2017-10-10 |
| 9721055 | Measurement model optimization based on parameter variations across a wafer | — | 2017-08-01 |
| 9710728 | Image based signal response metrology | Siddharth Srivastava | 2017-07-18 |
| 9569834 | Automated image-based process monitoring and control | Himanshu Vajaria, Shabnam Ghadar, Tommaso Torelli, Bradley Ries, Mohan Mahadevan | 2017-02-14 |
| 9518916 | Compressive sensing for metrology | Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2016-12-13 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2016-11-08 |
| 9383661 | Methods and apparatus for determining focus | — | 2016-07-05 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei Veldman, Andrei V. Shchegrov, Gregory Brady, Thaddeus Gerard Dziura, Alexander Kuznetsov | 2016-02-09 |
| 8843875 | Measurement model optimization based on parameter variations across a wafer | — | 2014-09-23 |