| 12236364 |
Metrology and process control for semiconductor manufacturing |
EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more |
2025-02-25 |
|
| 12117347 |
Metrology target design for tilted device designs |
Myungjun Lee, Mark D. Smith, Michael Adel, Eran Amit |
2024-10-15 |
$650,175,000 |
| 11763181 |
Metrology and process control for semiconductor manufacturing |
EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more |
2023-09-19 |
|
| 11710616 |
TEM-based metrology method and system |
Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more |
2023-07-25 |
|
| 11450541 |
Metrology method and system |
Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more |
2022-09-20 |
|
| 11372340 |
Method and system for providing a quality metric for improved process control |
Guy M. Cohen, Dana Klein, Vladimir Levinski, Noam Sapiens, Alex Shulman +3 more |
2022-06-28 |
$122,465,000 |
| 11309162 |
TEM-based metrology method and system |
Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more |
2022-04-19 |
|
| 11093840 |
Metrology and process control for semiconductor manufacturing |
EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more |
2021-08-17 |
$19,081,000 |
| 11054752 |
Device metrology targets and methods |
Eran Amit, Dror Alumot, Amit Shaked, Liran Yerushalmi |
2021-07-06 |
$92,735,000 |
| 10916404 |
TEM-based metrology method and system |
Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more |
2021-02-09 |
$17,692,000 |
| 10831108 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology |
Tal Marciano, Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld +17 more |
2020-11-10 |
$329,920,000 |
| 10685165 |
Metrology using overlay and yield critical patterns |
Mark D. Smith, Mark Wagner, Eran Amit, Myungjun Lee |
2020-06-16 |
|
| 10591406 |
Symmetric target design in scatterometry overlay metrology |
Barak Bringoltz, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher +4 more |
2020-03-17 |
|
| 10571811 |
Device metrology targets and methods |
Eran Amit, Dror Alumot, Amit Shaked, Liran Yerushalmi |
2020-02-25 |
|
| 10533940 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology |
Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz |
2020-01-14 |
|
| 10527954 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems |
Vladimir Levinski, Guy M. Cohen |
2020-01-07 |
|
| 10274425 |
Structured illumination for contrast enhancement in overlay metrology |
Joel Seligson, Noam Sapiens |
2019-04-30 |
|
| 10261014 |
Near field metrology |
Noam Sapiens, Joel Seligson, Vladimir Levinski, Yoel Feler, Barak Bringoltz +2 more |
2019-04-16 |
|
| 10234280 |
Reflection symmetric scatterometry overlay targets and methods |
Barak Bringoltz |
2019-03-19 |
|
| 10228320 |
Achieving a small pattern placement error in metrology targets |
Vladimir Levinski |
2019-03-12 |
$116,519,000 |
| 10203247 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more |
2019-02-12 |
|
| 10139528 |
Compound objectives for imaging and scatterometry overlay |
Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Andrew V. Hill |
2018-11-27 |
|
| 10126238 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology |
Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz |
2018-11-13 |
|
| 10101592 |
Self-moiré target design principles for measuring unresolved device-like pitches |
Vladimir Levinski, Yuri Paskover |
2018-10-16 |
|
| 9958385 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology |
Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz |
2018-05-01 |
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