Issued Patents All Time
Showing 25 most recent of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12236364 | Metrology and process control for semiconductor manufacturing | EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more | 2025-02-25 |
| 12117347 | Metrology target design for tilted device designs | Myungjun Lee, Mark D. Smith, Michael Adel, Eran Amit | 2024-10-15 |
| 11763181 | Metrology and process control for semiconductor manufacturing | EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more | 2023-09-19 |
| 11710616 | TEM-based metrology method and system | Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more | 2023-07-25 |
| 11450541 | Metrology method and system | Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more | 2022-09-20 |
| 11372340 | Method and system for providing a quality metric for improved process control | Guy M. Cohen, Dana Klein, Vladimir Levinski, Noam Sapiens, Alex Shulman +3 more | 2022-06-28 |
| 11309162 | TEM-based metrology method and system | Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more | 2022-04-19 |
| 11093840 | Metrology and process control for semiconductor manufacturing | EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more | 2021-08-17 |
| 11054752 | Device metrology targets and methods | Eran Amit, Dror Alumot, Amit Shaked, Liran Yerushalmi | 2021-07-06 |
| 10916404 | TEM-based metrology method and system | Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more | 2021-02-09 |
| 10831108 | Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology | Tal Marciano, Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld +17 more | 2020-11-10 |
| 10685165 | Metrology using overlay and yield critical patterns | Mark D. Smith, Mark Wagner, Eran Amit, Myungjun Lee | 2020-06-16 |
| 10591406 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher +4 more | 2020-03-17 |
| 10571811 | Device metrology targets and methods | Eran Amit, Dror Alumot, Amit Shaked, Liran Yerushalmi | 2020-02-25 |
| 10533940 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2020-01-14 |
| 10527954 | Multi-layer overlay metrology target and complimentary overlay metrology measurement systems | Vladimir Levinski, Guy M. Cohen | 2020-01-07 |
| 10274425 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Noam Sapiens | 2019-04-30 |
| 10261014 | Near field metrology | Noam Sapiens, Joel Seligson, Vladimir Levinski, Yoel Feler, Barak Bringoltz +2 more | 2019-04-16 |
| 10234280 | Reflection symmetric scatterometry overlay targets and methods | Barak Bringoltz | 2019-03-19 |
| 10228320 | Achieving a small pattern placement error in metrology targets | Vladimir Levinski | 2019-03-12 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Andrew V. Hill | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10101592 | Self-moiré target design principles for measuring unresolved device-like pitches | Vladimir Levinski, Yuri Paskover | 2018-10-16 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |