Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Yoel Feler, Mark Ghinovker, Evgeni Gurevich, Vladimir Levinski | 2021-11-02 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Mark Ghinovker, Vladimir Levinski, Inna Tarshish-Shapir | 2021-10-05 |
| 10761022 | Rotated boundaries of stops and targets | Tzahi Grunzweig | 2020-09-01 |
| 10699969 | Quick adjustment of metrology measurement parameters according to process variation | Einat Peled, Eran Amit, Yuval Lamhot, Noga Sella, Wei-Te Cheng | 2020-06-30 |
| 10591406 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina +4 more | 2020-03-17 |
| 10527952 | Fault discrimination and calibration of scatterometry overlay targets | Tzahi Grunzweig, Jordan Pio | 2020-01-07 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 9851300 | Decreasing inaccuracy due to non-periodic effects on scatterometric signals | Barak Bringoltz, Ofer Zaharan, Amnon Manassen, Nadav Carmel, Victoria Naipak +2 more | 2017-12-26 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Irina Paykin +4 more | 2017-08-22 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more | 2017-02-28 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9164397 | Optics symmetrization for metrology | Amnon Manassen, Daniel Kandel, Moshe Baruch, Joel Seligson, Guy M. Cohen +4 more | 2015-10-20 |
| 9080971 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Joel Seligson, Andrew V. Hill, Ohad Bachar +6 more | 2015-07-14 |
| 8896832 | Discrete polarization scatterometry | Andrew V. Hill, Amnon Manassen, Daniel Kandel, Vladimir Levinski, Joel Seligson +3 more | 2014-11-25 |
| 8873054 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Joel Seligson, Andrew V. Hill, Ohad Bachar +6 more | 2014-10-28 |
| 8441639 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Joel Seligson, Andrew V. Hill, Ohad Bachar +6 more | 2013-05-14 |
| 8390808 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Vladimir Levinski, Michael Adel, Mark Ghinovker | 2013-03-05 |
| 8243273 | Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods | Vladimir Levinski, Michael Adel, Mark Ghinovker | 2012-08-14 |