Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11861824 | Reference image grouping in overlay metrology | Einat Peled, Naama Cohen | 2024-01-02 |
| 11862522 | Accuracy improvements in optical metrology | Barak Bringoltz, Evgeni Gurevich, Ido Adam, Yoel Feler, Dror Alumot +6 more | 2024-01-02 |
| 11454894 | Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof | Alon Yagil, Ohad Bachar, Martin Mayo, Tal Yaziv, Roie Volkovich | 2022-09-27 |
| 11158548 | Overlay measurement using multiple wavelengths | Eran Amit, Einat Peled, Noga Sella, Wei-Te Cheng, Ido Adam | 2021-10-26 |
| 10699969 | Quick adjustment of metrology measurement parameters according to process variation | Einat Peled, Eran Amit, Alexander Svizher, Noga Sella, Wei-Te Cheng | 2020-06-30 |