Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527952 | Fault discrimination and calibration of scatterometry overlay targets | Tzahi Grunzweig, Alexander Svizher | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527952 | Fault discrimination and calibration of scatterometry overlay targets | Tzahi Grunzweig, Alexander Svizher | 2020-01-07 |