Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274425 | Structured illumination for contrast enhancement in overlay metrology | Noam Sapiens, Daniel Kandel | 2019-04-30 |
| 10261014 | Near field metrology | Noam Sapiens, Vladimir Levinski, Daniel Kandel, Yoel Feler, Barak Bringoltz +2 more | 2019-04-16 |
| 10139528 | Compound objectives for imaging and scatterometry overlay | Vladimir Levinski, Yuri Paskover, Amnon Manassen, Daniel Kandel, Andrew V. Hill | 2018-11-27 |
| 9645079 | Structured illumination for contrast enhancement in overlay metrology | Noam Sapiens, Daniel Kandel | 2017-05-09 |
| 9442369 | Method and apparatus for lithographic mask production | Dmitry Shur | 2016-09-13 |
| 9164397 | Optics symmetrization for metrology | Amnon Manassen, Daniel Kandel, Moshe Baruch, Alexander Svizher, Guy M. Cohen +4 more | 2015-10-20 |
| 9104120 | Structured illumination for contrast enhancement in overlay metrology | Noam Sapiens, Daniel Kandel | 2015-08-11 |
| 9080971 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Andrew V. Hill, Ohad Bachar +6 more | 2015-07-14 |
| 8908175 | Flexible scatterometry metrology system and method | Daniel Kandel, Michael Adel, Boris Golovanevsky | 2014-12-09 |
| 8896832 | Discrete polarization scatterometry | Andrew V. Hill, Amnon Manassen, Daniel Kandel, Vladimir Levinski, Alexander Svizher +3 more | 2014-11-25 |
| 8873054 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Andrew V. Hill, Ohad Bachar +6 more | 2014-10-28 |
| 8681413 | Illumination control | Amnon Manassen, Noam Sapiens | 2014-03-25 |
| 8582114 | Overlay metrology by pupil phase analysis | Amnon Manassen, Daniel Kandel, Moshe Baruch, Vladimir Levinski, Noam Sapiens +4 more | 2013-11-12 |
| 8441639 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Andrew V. Hill, Ohad Bachar +6 more | 2013-05-14 |
| 7876438 | Apparatus and methods for determining overlay and uses of same | Mark Ghinovker, Michael Adel, Jorge Poplawski | 2011-01-25 |
| 7724375 | Method and apparatus for increasing metrology or inspection tool throughput | Alex Novikov, Royi Levav, Yaron Zimmerman, Vladimir Levinski | 2010-05-25 |
| 7608468 | Apparatus and methods for determining overlay and uses of same | Mark Ghinovker, Michael Adel, Jorge Poplawski | 2009-10-27 |
| 7602491 | Optical gain approach for enhancement of overlay and alignment systems performance | Daniel Kandel, Vladimir Levinski, Michael Adel | 2009-10-13 |
| 7528941 | Order selected overlay metrology | Daniel Kandel, Vladimir Levinski, Michael Adel | 2009-05-05 |
| 7440105 | Continuously varying offset mark and methods of determining overlay | Michael Adel, Daniel Kandel | 2008-10-21 |
| 7310789 | Use of overlay diagnostics for enhanced automatic process control | Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +2 more | 2007-12-18 |
| 7111256 | Use of overlay diagnostics for enhanced automatic process control | Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +2 more | 2006-09-19 |
| 6928628 | Use of overlay diagnostics for enhanced automatic process control | Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel, Boris Simkin +1 more | 2005-08-09 |
| 6172349 | Autofocusing apparatus and method for high resolution microscope system | Isaac Katz, Michael Faeyrman, Yehuda Elisha, Shimon Kostianovsky, Yoram Uziel +1 more | 2001-01-09 |
| 4805038 | Imaging apparatus which includes a light-valve array having electrostatically deflectable elements | — | 1989-02-14 |