Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10897566 | Direct focusing with image binning in metrology tools | Nadav Gutman, Noam Gluzer | 2021-01-19 |
| 10755016 | Hot spot and process window monitoring | — | 2020-08-25 |
| 10354035 | Hot spot and process window monitoring | — | 2019-07-16 |
| 9970886 | Metrology tool stage configurations and operation methods | — | 2018-05-15 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Barak Bringoltz, Daniel Kandel +8 more | 2017-02-28 |
| 9546946 | Metrology target indentification, design and verification | Noam Sapiens | 2017-01-17 |
| 8908175 | Flexible scatterometry metrology system and method | Daniel Kandel, Michael Adel, Joel Seligson | 2014-12-09 |
| 8804111 | Multichip CCD camera inspection system | — | 2014-08-12 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +10 more | 2011-04-26 |
| 7804994 | Overlay metrology and control method | Michael Adel, Mark Ghinovker, Elyakim Kassel, John Robinson, Chris Mack +3 more | 2010-09-28 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +10 more | 2010-02-16 |
| 7616313 | Apparatus and methods for detecting overlay errors using scatterometry | Daniel Kandel, Walter D. Mieher | 2009-11-10 |
| 7298481 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +4 more | 2007-11-20 |
| 7277172 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals | Daniel Kandel, Kenneth P. Gross, Michael Friedmann, Jiyou Fu, Shakar Krishnan | 2007-10-02 |