Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142454 | Detection of probabilistic process windows | Jonathan Yannuzzi | 2024-11-12 |
| 11996265 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2024-05-28 |
| 11670480 | System and method for generating and analyzing roughness measurements | — | 2023-06-06 |
| 11664188 | Edge detection system | — | 2023-05-30 |
| 11521825 | System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control | — | 2022-12-06 |
| 11508546 | System and method for low-noise edge detection and its use for process monitoring and control | — | 2022-11-22 |
| 11380516 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-07-05 |
| 11361937 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-06-14 |
| 11355306 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2022-06-07 |
| 11004654 | System and method for generating and analyzing roughness measurements | — | 2021-05-11 |
| 11004653 | Edge detection system | — | 2021-05-11 |
| 10664955 | Edge detection system and its use for machine learning | — | 2020-05-26 |
| 10665417 | System and method for generating and analyzing roughness measurements | — | 2020-05-26 |
| 10665418 | System and method for generating and analyzing roughness measurements | — | 2020-05-26 |
| 10656532 | Edge detection system and its use for optical proximity correction | — | 2020-05-19 |
| 10648801 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | — | 2020-05-12 |
| 10522322 | System and method for generating and analyzing roughness measurements | — | 2019-12-31 |
| 10510509 | Edge detection system | — | 2019-12-17 |
| 10488188 | System and method for removing noise from roughness measurements | — | 2019-11-26 |
| 10176966 | Edge detection system | — | 2019-01-08 |
| 9188974 | Methods for improved monitor and control of lithography processes | Moshe E. Preil | 2015-11-17 |
| 7804994 | Overlay metrology and control method | Michael Adel, Mark Ghinovker, Elyakim Kassel, Boris Golovanevsky, John Robinson +3 more | 2010-09-28 |
| 7656512 | Method for determining lithographic focus and exposure | Walter D. Mieher, Thaddeus Gerard Dziura, Ady Levy | 2010-02-02 |
| 7566517 | Feature printability optimization by optical tool | Michael Adel | 2009-07-28 |
| 7528953 | Target acquisition and overlay metrology based on two diffracted orders imaging | Aviv Frommer, Vladimir Levinski, Mark D. Smith, Jeffrey Byers, Michael Adel | 2009-05-05 |