EK

Elyakim Kassel

KL Kla-Tencor: 3 patents #161 of 626Top 30%
Overall (All Time): #1,165,338 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10600635 Method and apparatus for a semiconductor-on-higher thermal conductive multi-layer composite wafer 2020-03-24
7925486 Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout Mark D. Smith, Robert Hardister, Mike Pochkowski, Amir Widmann, Mike Adel 2011-04-12
7804994 Overlay metrology and control method Michael Adel, Mark Ghinovker, Boris Golovanevsky, John Robinson, Chris Mack +3 more 2010-09-28
7671990 Cross hatched metrology marks and associated method of use Michael Adel, Vladimir Levinski 2010-03-02