| 11498189 |
Wrench |
Agmon David Porat |
2022-11-15 |
| 10649447 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers |
Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli |
2020-05-12 |
| 9651943 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers |
Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli |
2017-05-16 |
| 9576861 |
Method and system for universal target based inspection and metrology |
Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Ady Levy +2 more |
2017-02-21 |
| 9558978 |
Material handling with dedicated automated material handling system |
Michael Adel, Pati Sekula |
2017-01-31 |
| 9329033 |
Method for estimating and correcting misregistration target inaccuracy |
Eran Amit, Dana Klein, Guy M. Cohen, Nimrod Shuall, Amnon Manassen +1 more |
2016-05-03 |
| 9170209 |
Inspection guided overlay metrology |
Ellis Chang, Allen Park |
2015-10-27 |
| 9116442 |
Feedforward/feedback litho process control of stress and overlay |
Michael Adel, John Fielden, John Robinson, DongSub Choi |
2015-08-25 |
| 8948495 |
Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer |
Gino Marcuccilli, Ellis Chang, John Robinson, Allen Park |
2015-02-03 |
| 8804137 |
Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability |
DongSub Choi, Zain Saidin, Frank Laske, John Robinson |
2014-08-12 |
| 8655469 |
Advanced process control optimization |
DongSub Choi, Daniel Kandel, David Tien |
2014-02-18 |
| 8559001 |
Inspection guided overlay metrology |
Ellis Chang, Allen Park |
2013-10-15 |
| 8175831 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers |
Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli |
2012-05-08 |
| 8111376 |
Feedforward/feedback litho process control of stress and overlay |
Michael Adel, John Fielden, John Robinson, DongSub Choi |
2012-02-07 |
| 8045786 |
Waferless recipe optimization |
Mark Ghinovker, Dror Francis |
2011-10-25 |
| 7925486 |
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout |
Mark D. Smith, Robert Hardister, Mike Pochkowski, Elyakim Kassel, Mike Adel |
2011-04-12 |
| 7679069 |
Method and system for optimizing alignment performance in a fleet of exposure tools |
Michael Adel, John Robinson, Pavel Izikson, Brad Eichelberger, Atsuhiko Kato |
2010-03-16 |
| 7561282 |
Techniques for determining overlay and critical dimension using a single metrology tool |
— |
2009-07-14 |
| 6864458 |
Iced film substrate cleaning |
David Yogev, Yoram Uziel |
2005-03-08 |
