Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498189 | Wrench | Agmon David Porat | 2022-11-15 |
| 10649447 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli | 2020-05-12 |
| 9651943 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli | 2017-05-16 |
| 9576861 | Method and system for universal target based inspection and metrology | Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Ady Levy +2 more | 2017-02-21 |
| 9558978 | Material handling with dedicated automated material handling system | Michael Adel, Pati Sekula | 2017-01-31 |
| 9329033 | Method for estimating and correcting misregistration target inaccuracy | Eran Amit, Dana Klein, Guy M. Cohen, Nimrod Shuall, Amnon Manassen +1 more | 2016-05-03 |
| 9170209 | Inspection guided overlay metrology | Ellis Chang, Allen Park | 2015-10-27 |
| 9116442 | Feedforward/feedback litho process control of stress and overlay | Michael Adel, John Fielden, John Robinson, DongSub Choi | 2015-08-25 |
| 8948495 | Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer | Gino Marcuccilli, Ellis Chang, John Robinson, Allen Park | 2015-02-03 |
| 8804137 | Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability | DongSub Choi, Zain Saidin, Frank Laske, John Robinson | 2014-08-12 |
| 8655469 | Advanced process control optimization | DongSub Choi, Daniel Kandel, David Tien | 2014-02-18 |
| 8559001 | Inspection guided overlay metrology | Ellis Chang, Allen Park | 2013-10-15 |
| 8175831 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | Pavel Izikson, John Robinson, Mike Adel, DongSub Choi, Anat Marchelli | 2012-05-08 |
| 8111376 | Feedforward/feedback litho process control of stress and overlay | Michael Adel, John Fielden, John Robinson, DongSub Choi | 2012-02-07 |
| 8045786 | Waferless recipe optimization | Mark Ghinovker, Dror Francis | 2011-10-25 |
| 7925486 | Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout | Mark D. Smith, Robert Hardister, Mike Pochkowski, Elyakim Kassel, Mike Adel | 2011-04-12 |
| 7679069 | Method and system for optimizing alignment performance in a fleet of exposure tools | Michael Adel, John Robinson, Pavel Izikson, Brad Eichelberger, Atsuhiko Kato | 2010-03-16 |
| 7561282 | Techniques for determining overlay and critical dimension using a single metrology tool | — | 2009-07-14 |
| 6864458 | Iced film substrate cleaning | David Yogev, Yoram Uziel | 2005-03-08 |