Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inspection guided overlay metrology

Inspection guided overlay metrology

US Patent 8559001 · Granted Oct 15, 2013

Estimated economic value: $26,611,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gel stemming delivery system2025
Measurement of overlay error using device inspection system2023
Computer assisted weak pattern detection and quantification system2023
Wrench2022
Methods and systems for inspection of wafers and reticles using designer intent 2022
Method and system for mixed mode wafer inspection2022
Method and system for mixed mode wafer inspection2022
Adaptive material deposition for additive manufacturing2021
Blasting method and system2021
Measurement of overlay error using device inspection system2021
Using stochastic failure metrics in semiconductor manufacturing2020
Hybrid design layout to identify optical proximity correction-related systematic2020