| 10725385 |
Optimizing the utilization of metrology tools |
Tsachy Holovinger, Liran Yerushalmi, DongSub Choi |
2020-07-28 |
| 10295993 |
Method and system for detecting and correcting problematic advanced process control parameters |
DongSub Choi |
2019-05-21 |
| 10095121 |
Optimizing the utilization of metrology tools |
Tsachy Holovinger, Liran Yerushalmi, DongSub Choi |
2018-10-09 |
| 9709903 |
Overlay target geometry for measuring multiple pitches |
DongSub Choi |
2017-07-18 |
| 9476838 |
Hybrid imaging and scatterometry targets |
DongSub Choi, Tal Itzkovich |
2016-10-25 |
| 9466100 |
Focus monitoring method using asymmetry embedded imaging target |
DongSub Choi, Bill Pierson, James Manka, Dongsuk Park |
2016-10-11 |
| 9291920 |
Focus recipe determination for a lithographic scanner |
James Manka, Christian Sparka |
2016-03-22 |
| 8655469 |
Advanced process control optimization |
DongSub Choi, Amir Widmann, Daniel Kandel |
2014-02-18 |
| 6978535 |
Pressing device for thin-film circuit and terminal |
— |
2005-12-27 |