Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675277 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2023-06-13 |
| 11231654 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2022-01-25 |
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Hongliang Shen, Guoxiang Ning, Erfeng Ding, Xiaoxiao Zhang, Lan Yang | 2020-10-13 |
| 10733354 | System and method employing three-dimensional (3D) emulation of in-kerf optical macros | Hojin Kim, Dongyue Yang, Dong-Ick Lee, Yue Zhou, Jae Ho Joung +2 more | 2020-08-04 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |
| 10483214 | Overlay structures | Xintuo Dai, Guoxiang Ning, Mert Karakoy | 2019-11-19 |
| 10103070 | Dynamic integrated circuit fabrication methods | Wangkeun Cho, Wen-Hua Cheng | 2018-10-16 |
| 9633915 | Method of using dummy patterns for overlay target design and overlay control | Yue Zhou, Mert Karakoy | 2017-04-25 |
| 9466100 | Focus monitoring method using asymmetry embedded imaging target | DongSub Choi, Bill Pierson, David Tien, James Manka | 2016-10-11 |