Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Hongliang Shen, Guoxiang Ning, Erfeng Ding, Dongsuk Park, Xiaoxiao Zhang | 2020-10-13 |
| 9379186 | Fet structure for minimum size length/width devices for performance boost and mismatch reduction | Qin Wang, Min-hwa Chi, Meixiong Zhao, Zhaoxu Shen, Haiting Wang +1 more | 2016-06-28 |
| 7769071 | Silica sol gel micro-laser on a substrate | Kerry Vahala | 2010-08-03 |
| 7236664 | Replica micro-resonator and method of fabrication | Andrea Lynn Martin, Deniz Armani, Kerry Vahala | 2007-06-26 |