Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675277 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Dongsuk Park, Minghao Tang, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2023-06-13 |
| 11231654 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Dongsuk Park, Minghao Tang, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2022-01-25 |
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Xintuo Dai, Sanggil Bae +7 more | 2020-11-10 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Dongsuk Park, Minghao Tang, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |
| 10504851 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Xintuo Dai, Sanggil Bae +7 more | 2019-12-10 |