Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675277 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Dongsuk Park, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2023-06-13 |
| 11231654 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Dongsuk Park, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2022-01-25 |
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Sanggil Bae, Rui Chen +7 more | 2020-11-10 |
| 10809633 | Overlay control with corrections for lens aberrations | Dongyue Yang, Cheuk Wun Wong, Sanggil Bae | 2020-10-20 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Dongsuk Park, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |
| 10635007 | Apparatus and method for aligning integrated circuit layers using multiple grating materials | Dongyue Yang, Keith H. Tabakman, Guanchen He, Xueli Hao | 2020-04-28 |
| 10504851 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Sanggil Bae, Rui Chen +7 more | 2019-12-10 |
| 10483214 | Overlay structures | Dongsuk Park, Guoxiang Ning, Mert Karakoy | 2019-11-19 |
| 10062772 | Preventing bridge formation between replacement gate and source/drain region through STI structure | Haigou Huang, Xusheng Wu | 2018-08-28 |
| 10056458 | Siloxane and organic-based MOL contact patterning | Chang Ho Maeng, Andy Wei, Anthony Ozzello, Bharat Krishnan, Guillaume Bouche +9 more | 2018-08-21 |
| 9991361 | Methods for performing a gate cut last scheme for FinFET semiconductor devices | Haigou Huang, Xusheng Wu | 2018-06-05 |
| 9947545 | Methods for gate formation in circuit structures | Jiong Li | 2018-04-17 |
| 9812324 | Methods to control fin tip placement | Lei Zhuang, Lars Liebmann, Stuart A. Sieg, Fee Li Lie, Mahender Kumar +3 more | 2017-11-07 |
| 9780002 | Threshold voltage and well implantation method for semiconductor devices | Brian J. Greene, Mahender Kumar, Daniel James Dechene, Daniel Jaeger | 2017-10-03 |
| 9698018 | Introducing self-aligned dopants in semiconductor fins | Haigou Huang, Jinping Liu | 2017-07-04 |
| 9640402 | Methods for gate formation in circuit structures | Jiong Li | 2017-05-02 |
| 9627274 | Methods of forming self-aligned contacts on FinFET devices | Haifeng Sheng, Jinping Liu, Huang Liu | 2017-04-18 |
| 9620380 | Methods for fabricating integrated circuits using self-aligned quadruple patterning | Huang Liu, Jin Ping Liu, Jiong Li | 2017-04-11 |
| 9606432 | Alternating space decomposition in circuit structure fabrication | Guoxiang Ning, Huang Liu, Chin Teong Lim | 2017-03-28 |
| 9329471 | Achieving a critical dimension target based on resist characteristics | Guoxiang Ning, Huang Liu, Chin Teong Lim | 2016-05-03 |
| 9329495 | Overlay metrology system and method | Binbin Yan | 2016-05-03 |