Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466596 | System and method for field-by-field overlay process control using measured and estimated field parameters | Ramkumar Karur-Shanmugam, Chin-Chou Huang, Ady Levy, John Robinson | 2019-11-05 |
| 9466100 | Focus monitoring method using asymmetry embedded imaging target | DongSub Choi, David Tien, James Manka, Dongsuk Park | 2016-10-11 |