CS

Christian Sparka

KL Kla-Tencor: 2 patents #566 of 1,394Top 45%
Overall (All Time): #1,941,613 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10340165 Systems and methods for automated multi-zone detection and modeling Jeremy Nabeth, Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Hoyoung Heo +4 more 2019-07-02
9291920 Focus recipe determination for a lithographic scanner James Manka, David Tien 2016-03-22