Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221561 | System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control | Fatima Anis, Mark D. Smith | 2022-01-11 |
| 10754260 | Method and system for process control with flexible sampling | Roie Volkovich, William Pierson, Mark Wagner, Dana Klein | 2020-08-25 |
| 10691028 | Overlay variance stabilization methods and systems | Hoyoung Heo, William Pierson, Jeremy Nabeth, Sanghuck Jeon, Miguel Garcia-Medina +1 more | 2020-06-23 |
| 10692227 | Determination of sampling maps for alignment measurements based on reduction of out of specification points | Brent A. Riggs, William Pierson | 2020-06-23 |
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | William Pierson, Mark D. Smith, Jeremy Nabeth, Miguel Garcia-Medina, Lipkong Yap | 2019-10-15 |
| 10340165 | Systems and methods for automated multi-zone detection and modeling | Jeremy Nabeth, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Christian Sparka, Hoyoung Heo +4 more | 2019-07-02 |