Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10691028 | Overlay variance stabilization methods and systems | Hoyoung Heo, William Pierson, Jeremy Nabeth, Sanghuck Jeon, Onur N. Demirer +1 more | 2020-06-23 |
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | Onur N. Demirer, William Pierson, Mark D. Smith, Jeremy Nabeth, Lipkong Yap | 2019-10-15 |