Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221561 | System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control | Onur N. Demirer, Mark D. Smith | 2022-01-11 |
| 10340165 | Systems and methods for automated multi-zone detection and modeling | Jeremy Nabeth, Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Christian Sparka +4 more | 2019-07-02 |