Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649447 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | John Robinson, Mike Adel, Amir Widmann, DongSub Choi, Anat Marchelli | 2020-05-12 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Wolfgang Henke, Thomas Leo Maria Hoogenboom, Paul Frank Luehrmann, Daan Maurits Slotboom +2 more | 2018-05-15 |
| 9651943 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | John Robinson, Mike Adel, Amir Widmann, DongSub Choi, Anat Marchelli | 2017-05-16 |
| 9620426 | Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation | John Robinson, Daniel Kandel | 2017-04-11 |
| 9606453 | Method and system for providing tool induced shift using a sub-sampling scheme | Guy M. Cohen | 2017-03-28 |
| 9052709 | Method and system for providing process tool correctables | Guy M. Cohen, Dana Klein | 2015-06-09 |
| 8175831 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | John Robinson, Mike Adel, Amir Widmann, DongSub Choi, Anat Marchelli | 2012-05-08 |
| 8142966 | Substrate matrix to decouple tool and process effects | Michael Adel, Daniel Kandel | 2012-03-27 |
| 7873585 | Apparatus and methods for predicting a semiconductor parameter across an area of a wafer | — | 2011-01-18 |
| 7804994 | Overlay metrology and control method | Michael Adel, Mark Ghinovker, Elyakim Kassel, Boris Golovanevsky, John Robinson +3 more | 2010-09-28 |
| 7679069 | Method and system for optimizing alignment performance in a fleet of exposure tools | Michael Adel, John Robinson, Brad Eichelberger, Amir Widmann, Atsuhiko Kato | 2010-03-16 |
| 7310789 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Michael Adel, Boris Simkin +2 more | 2007-12-18 |
| 7111256 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Michael Adel, Boris Simkin +2 more | 2006-09-19 |
| 6928628 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Michael Adel, Boris Simkin +1 more | 2005-08-09 |