AK

Atsuhiko Kato

KS Komatsu Shisakusho: 2 patents #235 of 885Top 30%
KL Kla-Tencor: 1 patents #316 of 626Top 55%
Overall (All Time): #1,567,342 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
7679069 Method and system for optimizing alignment performance in a fleet of exposure tools Michael Adel, John Robinson, Pavel Izikson, Brad Eichelberger, Amir Widmann 2010-03-16
4924153 Apparatus for guiding movement of an unmanned moving body Suzuki Toru, Mitsuo Hosoi, Ichiro Nakano 1990-05-08
4862047 Apparatus for guiding movement of an unmanned moving body Toru Suzuki, Mitsuo Hosoi, Ichiro Nakano 1989-08-29