Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7678516 | Test structures and methods for monitoring or controlling a semiconductor fabrication process | Kevin P. Monahan, Ady Levy | 2010-03-16 |
| 7679069 | Method and system for optimizing alignment performance in a fleet of exposure tools | Michael Adel, John Robinson, Pavel Izikson, Amir Widmann, Atsuhiko Kato | 2010-03-16 |