Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709434 | Device manufacturing method | Rizvi Rahman, Cornelis Johannes Henricus LAMBREGTS | 2023-07-25 |
| 11249404 | System and method for measurement of alignment | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Rene Marinus Gerardus Johan Queens, Wim Tjibbo Tel, Theodorus Franciscus Adrianus Maria Linschoten | 2022-02-15 |
| 11150565 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens | 2021-10-19 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more | 2021-02-09 |
| 10845719 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Arend Johannes Donkerbroek, Jeroen COTTAAR | 2020-11-24 |
| 10281825 | Method of sequencing lots for a lithographic apparatus | Michiel Kupers | 2019-05-07 |
| 10078273 | Lithographic apparatus with data processing apparatus | Emil Peter Schmitt-Weaver, Christopher PRENTICE, Frank Staals, Wim Tjibbo Tel | 2018-09-18 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann, Daan Maurits Slotboom +2 more | 2018-05-15 |
| 9715181 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Marc Jurian Kea | 2017-07-25 |
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Eduardus Johannes Gerardus Boon, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme +2 more | 2016-11-29 |
| 8440475 | Alignment calculation | Boris Habets, Michiel Kupers | 2013-05-14 |
| 7727837 | Method of producing an integrated circuit having a capacitor with a supporting layer | Ulrike Gruening-von Schwerin, Rolf Weis, Odo Wunnicke, Till Schloesser, Florian Schnabel +1 more | 2010-06-01 |
| 7462426 | Method for producing a phase mask | Gerhard Kunkel | 2008-12-09 |
| 6620559 | Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements | Gunther Czech, Carsten Fülber | 2003-09-16 |