Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366397 | Method and apparatus for simulation of lithography overlay | Stefan Buhl | 2022-06-21 |
| 10739685 | Process control method for lithographically processed semiconductor devices | Stefan Buhl, Wan Soo Kim | 2020-08-11 |
| 10739688 | Method and apparatus for fabricating wafer by calculating process correction parameters | — | 2020-08-11 |
| 10699971 | Method for processing of a further layer on a semiconductor wafer | Martin Roessiger, Stefan Buhl | 2020-06-30 |
| 10379447 | Method and apparatus for simulation of lithography overlay | — | 2019-08-13 |
| 10310490 | Method and apparatus of evaluating a semiconductor manufacturing process | Stefan Buhl, Martin Rößiger | 2019-06-04 |
| 10295914 | Method and apparatus for fabricating wafer by calculating process correction parameters | — | 2019-05-21 |
| 10234401 | Method of manufacturing semiconductor devices by using sampling plans | Stefan Buhl, Martin Roeßiger, Georg Erley | 2019-03-19 |
| 10008422 | Method for assessing the usability of an exposed and developed semiconductor wafer | Martin Roessiger, Stefan Buhl | 2018-06-26 |
| 9543223 | Method and apparatus for fabricating wafer by calculating process correction parameters | — | 2017-01-10 |
| 8440475 | Alignment calculation | Michiel Kupers, Wolfgang Henke | 2013-05-14 |
| 7783444 | Systems and methods of alternative overlay calculation | Michiel Kupers | 2010-08-24 |