Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815050 | Device for supplying fuel and vehicle comprising a device of this type | Alexander Hofmann | 2023-11-14 |
| 11639017 | Lamella block with continuously varied lamella division | Michael Esswein, Walter Breuning | 2023-05-02 |
| 11590681 | Fin block with continuously varied fin width | Michael Esswein, Walter Breuning | 2023-02-28 |
| 11434844 | Method for checking a variable valve lift control of an internal combustion engine | — | 2022-09-06 |
| 11366397 | Method and apparatus for simulation of lithography overlay | Boris Habets | 2022-06-21 |
| 11181830 | Lithographic apparatus and method of controlling a lithographic apparatus | Philip Groeger, Wansoo Kim | 2021-11-23 |
| 11092901 | Wafer exposure method using wafer models and wafer fabrication assembly | Philip Groeger, Patrick Lomtscher | 2021-08-17 |
| 10739685 | Process control method for lithographically processed semiconductor devices | Boris Habets, Wan Soo Kim | 2020-08-11 |
| 10699971 | Method for processing of a further layer on a semiconductor wafer | Boris Habets, Martin Roessiger | 2020-06-30 |
| 10310490 | Method and apparatus of evaluating a semiconductor manufacturing process | Martin Rößiger, Boris Habets | 2019-06-04 |
| 10234401 | Method of manufacturing semiconductor devices by using sampling plans | Martin Roeßiger, Georg Erley, Boris Habets | 2019-03-19 |
| 10008422 | Method for assessing the usability of an exposed and developed semiconductor wafer | Boris Habets, Martin Roessiger | 2018-06-26 |