Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699971 | Method for processing of a further layer on a semiconductor wafer | Boris Habets, Stefan Buhl | 2020-06-30 |
| 10008422 | Method for assessing the usability of an exposed and developed semiconductor wafer | Boris Habets, Stefan Buhl | 2018-06-26 |
| 8018070 | Semiconductor device, method for manufacturing semiconductor devices and mask systems used in the manufacturing of semiconductor devices | Stefan Blawid, Ludovic Lattard, Roman Knoefler, Manuela Gutsch, David Pritchard | 2011-09-13 |
| 7177788 | Method for determining statistical fluctuations of values of geometrical properties of structures required for the fabrication of semiconductor components | — | 2007-02-13 |