Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092901 | Wafer exposure method using wafer models and wafer fabrication assembly | Stefan Buhl, Philip Groeger | 2021-08-17 |
| 7248351 | Optimizing light path uniformity in inspection systems | William Roberts, Gerhard Kunkel, Karl-Heinz Schumacher | 2007-07-24 |