Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306545 | Determining lithographic matching performance | Yingchao Cui, Hadi YAGUBIZADE, Xiuhong Wei, Jeonghyun Park, Sarathi ROY +3 more | 2025-05-20 |
| 12044980 | Method of manufacturing devices | Abraham SLACHTER, Wim Tjibbo Tel, Vadim Yourievich TIMOSHKOV, Koen Wilhelmus Cornelis Adrianus Van Der Straten, Boris Menchtchikov +7 more | 2024-07-23 |
| 11860549 | Method for controlling a manufacturing apparatus and associated apparatuses | Wolter Siemons, Erik Peter De Kort | 2024-01-02 |
| 11860548 | Method for characterizing a manufacturing process of semiconductor devices | Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Marc Jurian Kea, Mark John Maslow, Koen Thuijs +3 more | 2024-01-02 |
| 11809088 | Method for controlling a lithographic apparatus | Hadi YAGUBIZADE, Min Seok Kim, Yingchao Cui, Jeonghyun Park, Jeroen COTTAAR | 2023-11-07 |
| 11366396 | Method and apparatus for configuring spatial dimensions of a beam during a scan | Hermannes Theodorus Heijmerikx, Javier Augusto Loaiza Rivas, Jeroen COTTAAR | 2022-06-21 |
| 10908512 | Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Michiel Kupers | 2021-02-02 |
| 10719011 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier | 2020-07-21 |
| 10444632 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders, Bart Dinand Paarhuis | 2019-10-15 |
| 10254658 | Metrology method, target and substrate | Arie Jeffrey Den Boef, Martin Ebert | 2019-04-09 |
| 10095131 | Alignment modeling and a lithographic apparatus and exposure method using the same | Pieter Jacob Kramer, Rogier Sebastiaan GILIJAMSE, Niels Lammers | 2018-10-09 |
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Xing Lan Liu, Wim Tjibbo Tel, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2018-07-17 |
| 9989858 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders, Bart Dinand Paarhuis | 2018-06-05 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann +2 more | 2018-05-15 |
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Eduardus Johannes Gerardus Boon, Jean-Philippe Xavier Van Damme, Wolfgang Henke +2 more | 2016-11-29 |