Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762304 | Lithographic apparatus | Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Martinus Van Duijnhoven, Francis Fahrni, Frank Johannes Jacobus Van Boxtel +2 more | 2023-09-19 |
| 10459354 | Lithographic apparatus and lithographic projection method | Kevin VAN DE RUIT, Jean-Philippe Xavier Van Damme, Johannes Onvlee, Cornelis Melchior BROUWER | 2019-10-29 |
| 10444632 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Daan Maurits Slotboom, Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders | 2019-10-15 |
| 9989858 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Daan Maurits Slotboom, Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders | 2018-06-05 |
| 9081311 | Lithographic apparatus and device manufacturing method | Herman Vogel, Jeroen Gerard Gosen, Frank Johannes Jacobus Van Boxtel, Jinggao Li | 2015-07-14 |
| 8810769 | Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus | Jeroen Gerard Gosen, Antonius Johannus Van Der Net, Frank Johannes Jacobus Van Boxtel, Jinggao Li | 2014-08-19 |
| 7963144 | Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system | Norbertus Benedictus Koster, Richard Versluis | 2011-06-21 |
| 7624617 | Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system | Norbertus Benedictus Koster, Richard Versluis | 2009-12-01 |